Here is the abstract you requested from the IMAPS_2013 technical program page. This is the original abstract submitted by the author. Any changes to the technical content of the final manuscript published by IMAPS or the presentation that is given during the event is done by the author, not IMAPS.
|A fully automated execution of complex DOE to characterize electroplating baths|
|Keywords: doe, electroplating, design of experiments|
|A new tool has been invented that enables a fast and efficient execution of design of experiments (DOE) for the characterization of electroplating chemistries. Generating such a DOE and evaluating corresponding results are ideally carried out by means of statistics software, e.g. JMP or Statistica. In this combination many hours of tedious manual ratio mixing of constituents and exhausting performance analysis can be saved. This new procedure uses a commercially available analysis system (tool) to systematically and fully automated handle up to four different additives in conjunction with basic electrolytes and to evaluate the impact of these additives on the electrochemical behavior of the plating bath. The total cell volume as well as the DOE specific concentrations of the individual tests are organized in a customer managed Excel sheet, where, in addition, measuring recipes can be selected. These recipes have predefined curve shapes like sweeps used for CVS (Cyclic Voltammetry Stripping) or PCGA (Pulsed Cyclic Galvanostatic Analysis), which can also be customized to a certain extent to meet specific requirements. The customer can adapt them beyond that by controlling a variety of parameters. Results obtained from DOE runs are provided as raw data which are processed by a separate Excel macro in order to further evaluate them through arbitrary software. With the entire hardware configuration required for the extended functionality as described, conventional electrochemical analyses can be conducted as well.|
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