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Printed electronics based on nanoparticular TCO materials
Keywords: Printed electronics, Nanoparticular TCO materials, Ultrathin TCO films
Printed electronics based on nanoparticular TCO materials Printed electronics is an upcoming technology in which electrically functional devices are produced by printing methods. Transparent conductive oxide (TCO) materials as indium tin oxide (ITO) or ZnO combine a low electrical resistivity with a high transparency in the regime of visible light. These materials are of essential importance as transparent electrode material for flat panel displays, solar cells and touch screens. Rather brittle TCO layers are manufactured by conventional cost-intensive vacuum-based physical vapor deposition (PVD) processes. Printing techniques for nanoparticulate TCO material systems could overcome the disadvantages named above and are therefore of special interest. Depending on the architecture of the desired electronic device thin planar functional films or fine structures are required. The manufacture of planar ultrathin TCO films by the slot-die coating and the rotary printing process is presented. Slot-die coating is a self-metering coating method in contrast to rotary printing, i.e., the amount of coated fluid is independent on the coating speed; therefore slot-die coating allows continuous processing of a fixed wet film thickness at nearly arbitrary velocities with high layer quality. The manufactured sub-µm thin ITO coatings are characterized concerning its layer thickness, specific resistance and transmission. The interrelations between these properties and the process parameters used will be discussed to manufacture electronic devices like a field effect transistor (FET). Inkjet printing was used for the processing of functional sub-μm thin structures. The performance of a FET manufactured by the aid of printing and coating techniques will be presented.
Moritz Wegener,
University of Erlangen-Nuremberg, Department of Materials Science, Glass and Ceramics, 91058 Erlangen, Germany
Erlangen, Bavaria

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