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Microstructure and gas sensitive properties of high orientated LaBaCo2O5+δ thin films on SiO2/ Si (001)
Keywords: gas sensitivity, oxide films, microstructure
Cobalt based perovskite oxides( LnACo2O5+δ(Ln=Pr, La,Gd; A=Ba, Sr )) films materials have attracted many attentions due to unique electronic and magnetic properties, which promote their broad applications in gas and chemical sensor, fuel cells and partial oxidation reactors. In this paper, we will report the successful fabrication of high orientated LaBaCo2O5+δ (LBCO) thin films on SiO2/Si (001) substrates using a polymer assisted deposition (PAD), which is a high advanced chemical solution deposition technique. X-ray diffraction (XRD) and Transmission Electron Microscope prove the single phase structure and (111) preferred orientation of the LBCO films. Then the gas sensitive properties of LBCO films were investigated by the resistivity measurements. The results confirmed that the high orientated LBCO thin films also exhibit high selectivity and sensitivity to O2 and an excellent stability over a large temperature range from 300 °C to 900 °C.
Dunhua Hong,
State Key Laboratory of Electronic Thin films and Integrated Devices, University of Electronic Science & Technology of China
chengdu, Sichuan

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