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Electromagnetic Pump Made in a Hybrid Polymer-Ceramic Technology
Keywords: microfluidics pump, electromagnetic pump, LTCC
Miniaturization is a trend which pushes ahead modern science and chemical engineering. Microfluidics is one of the fastest developing field of the modern chemical engineering. Application of microelectronic technologies give possibility to fabricate miniature chemical devices which can handle with fluids in microliter scale. They are called microfluidic systems. Microfluidics is a domain where microtechnology, chemistry and biology meet to manufacture a microsystem which will be able to substitute a large conventional laboratory equipment. Working principle of such devices is based on many various components like valves, channels, mixers, chambers, etc. One of the most important part of the microfluidics systems is a pump. However, it is challenging to manufacture a reliable, miniaturized and integrated pump. In this paper a technology and performance of the pump made in a hybrid PDMS-LTCC (Low Temperature Co-fired Ceramics) technology is described. The working principle of the presented device is based on electromagnetic reaction between a coil and a flexible membrane with a fixed permanent magnet. The electromagnetic pump consist of a rigid microfluidic structure with an embedded multilayer coil and a flexible polymeric membrane. A PDMS technology was used to manufacture the membrane. Both, the PDMS membrane and LTCC microfluidic structure are bonded together using a dielectric barrier discharge plasma in an atmospheric pressure.
Mateusz Czok,
Wrocław University of Technology
Wrocław ,

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