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A MEMS Gyroscope for High Temperature Environments
Keywords: high temperature, MEMS, gyroscope
Advances in oil exploration and other harsh environment industries have created a need for high precision inertial sensors that can operate at very high temperatures. Now more than ever the downhole drilling industry is utilizing a multitude of sensors to better understand the motion of the drill string below the surface, optimize operations and prevent damage. A key measurement for such a system is angular rate, or rotation. This paper presents the first MEMS gyroscope sensor with integrated signal conditioning that is specified for operation at 175°C. Measuring rotation rate with a gyroscope has several advantages compared to using magnetometers or other sensors; it is immune to ferrous materials and can detect sudden changes in rate. The device is fabricated on a patented BiMOS process that has been proven field reliable in high volume industrial applications. We will explore the unique quad differential sensor element design that gives excellent shock and vibration rejection. A new ceramic vertical mount package was developed for this sensor that allows the device to be robustly mounted to the PCB for either pitch or roll rate response. A temperature sensor output is available on chip and we will discuss methods for calibrating sensor output over temperature.
Jeff Watson, Systems
Analog Devices
Stevens, PA

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