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|High Performance Hydrogen getter for hermetic packaging of electronic devices|
|Keywords: Hydrogen, Getter, Sorption|
|The performance degradation of microelectronic devices due to moisture and hydrogen is a well-known problem, particularly for GaAs based devices. In recent years an increasing number of hermetically sealed devices have been found to be sensitive to hydrogen, further demanding tighter controls of the contamination level. Hydrogen can evolve within a device (for example from internal plating) and directly affect the device characteristics. Additionally the presence of hydrogen can indirectly lead to increased moisture levels due to its interaction with oxides and trace oxygen. The goal of hydrogen-free, hermetically sealed packages can be successfully achieved through the integration of a dedicated high capacity getter that is both economical and process friendly to implement. The properties of such a getter are presented and discussed with reference to sorption profiles and performance characteristics.|