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Active and Passive Vibration Control of Ultrasonic Bonding Transducers
Keywords: Ultrasonic Bonding, Transducers, Vibration Control
• Aim: Reduction of ultrasonic vibrations orthogonal to the main operation mode in wire bonding process. • Result: A novel prototype transducer with additional piezoelectric actuators in a specific configuration. • The system features high coupling to orthogonal vibration modes and acts neutral to main longitudinal vibrations. • The piezoelectric shunt damping technique with a passive LR-network as well as active vibration controls were studied. • Measurements were carried out with optimal tuned LR-network and optimal control actuator voltage. • A strong reduction in vibration amplitudes of the orthogonal vibrations without effecting the longitudinal vibrations was observed.
Dr. Hans Hesse ,
Hesse Mechatronics, Inc.
Mineola, NY

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