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|LTCC-based pressure sensors for elevated operation temperatures up to 300°C|
|Keywords: LTCC pressure sensor, high temperature, joining technology|
|A LTCC-based sensor for pressure measurements at elevated operation temperatures up to 300°C is presented. The sensor system consists of the DP 951 based diaphragm body as well as a high temperature suited stainless steel based sensor housing and pressure connection. The paper discusses the results of FE calculations for the mechanical design of the sensor and its housing. Furthermore, different metal brazing (hard and active metal brazing) and glass joining solutions were developed. The used materials and joining processes are described. Sensors for different operational pressures were built and characterized regarding DIN/ ISO 16086. The paper discusses the sensor characteristics and gives an outlook to further investigations.|