Here is the abstract you requested from the cicmt_2018 technical program page. This is the original abstract submitted by the author. Any changes to the technical content of the final manuscript published by IMAPS or the presentation that is given during the event is done by the author, not IMAPS.
|A Temperature Stable Probe for Plasma Diagnostics Realized in Ceramic Multilayer Technology|
|Keywords: LTCC, Plasma diagnosis, High operating temperature|
|Plasma is used for a big variety of industrial applications. The spectrum ranges from medical applications like sterilization and etching in semiconductor processes to deposition of optical surfaces and plasma carburization of mechanical parts. The multipole resonance probe (MRP) is a robust and sensitive plasma probe which facilitates the measurement of important parameters of the plasma process: electron density, electron temperature, and collision frequency. As some of the plasma processes operate at temperatures which are prohibitive for organic circuit boards (>500°C), a temperature stable implementation was required. Low temperature co-fired ceramic (LTCC) is the material of choice because of its good microwave properties and the potential to be used at high temperatures. This paper shall describe the construction of the MRP as a ceramic multilayer, its microwave connection to the instrument and the successful test in the laboratory as well as in the industrial environment.|