Micross

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A Temperature Stable Probe for Plasma Diagnostics Realized in Ceramic Multilayer Technology
Keywords: LTCC, Plasma diagnosis, High operating temperature
Plasma is used for a big variety of industrial applications. The spectrum ranges from medical applications like sterilization and etching in semiconductor processes to deposition of optical surfaces and plasma carburization of mechanical parts. The multipole resonance probe (MRP) is a robust and sensitive plasma probe which facilitates the measurement of important parameters of the plasma process: electron density, electron temperature, and collision frequency. As some of the plasma processes operate at temperatures which are prohibitive for organic circuit boards (>500C), a temperature stable implementation was required. Low temperature co-fired ceramic (LTCC) is the material of choice because of its good microwave properties and the potential to be used at high temperatures. This paper shall describe the construction of the MRP as a ceramic multilayer, its microwave connection to the instrument and the successful test in the laboratory as well as in the industrial environment.
Peter Uhlig,
IMST GmbH
Kamp-Lintfort, NRW
Germany


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