Device Packaging 2019

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Fabrication and Characterization of an LTCC-Based Thermoelectric Generator with Embedded Heat Source
Keywords: Thermocouples, Micro-generators, LTCC
The main purpose of this paper is to convert the heat released by an integrated circuit into an electric energy. In this aim, we intend to fabricate a thermoelectric generator based on LTCC technology. We will discuss, then, the different stages of the generator�s fabrication. Also, we will study the electrical output parameters of three different generators with different thermocouples materials: Silver/Nickel (Ag/Ni), Silver/ Silver palladium (Ag/PdAg) and Silver/Platinum (Ag/Pt). In fact, the output voltage of the generator depends on the temperature difference between the hot and cold parts of the thermocouples. In this order, a heat source, an integrated circuit in general, was surrounded by the hot parts of the thermoelements. This will allows the heat to flow into the thermocouples arms, placed in series, and be converted into electric energy by the Seebeck effect. Each generator contains 104 thermocouples with different lengths vary from 9 to 17mm. The width and spacing between the thermocouples arms were equal to 300�m. This paper presents the output voltage and power of the generators while increasing the power of the heat source. The results of the fabricated generators with the integration of 104 thermocouples show that the Ag/Ni one provides the highest output voltage. It generates an output voltage about 0.056V while the heat source power is about 6W.
Nesrine Jaziri, Student
METS Research Unit, National Engineering School of Sfax Tunisia
Sahline, Monastir

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