Device Packaging 2019

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An atmospheric pressure plasma jet made in LTCC technology – preliminary results
Keywords: Low Temperature Cofired Ceramics , Atmospheric Pressure Plasma Jets, Dielectric Barrier Discharge
Plasma is an ionized gas, which exhibits collective behavior. If ions have different (lower) temperature than electrons, the plasma is referred to as cold. Typically cold plasmas are generated in low-pressure discharge reactors. However, it is sometimes necessary to create cold plasma at atmospheric pressure. Atmospheric Pressure Plasma Jets (APPJ) are sources of plasma, that work at atmospheric pressure in an open environment. These devices allow to expand the plasma outside of the discharge core area. They may vary in geometry and placement of electrodes, operating frequency or used carrier gas. Such devices have different applications, such as material deposition or etching, surface modification, nanomaterial synthesis, bio-decontamination and in the medical field. In this work, we present APPJ made in Low Temperature Cofired Ceramics Technology. This material exhibits very good reliability, allows to operate at elevated temperature (up to 600 C), in a strong electric field and is inert to many of chemical species. The device operated in Dielectric Barrier Discharge (DBD) mode with Microhollow Cathode Discharge (MHCD) based electrodes arrangement. The APPJs were fabricated in DuPont 951 tape system with gold electrodes. The distance between them was 210 μm and the diameter of aperture (region of discharge) about 150 μm. The diameter of APPJs was ca. 19.5 mm. The housing was fabricated from ABS (Acrylonitrile Butadiene Styrene) polymer. The jets and HV supply were connected using spring electrodes. We ignited discharges in air, argon, helium, and nitrogen. They differed emissions spectra and properties. We also observed degradation of uncovered electrodes and their sputtering. The examination of APPJs was made with mean of an optical microscope and Scanning Electron Microscope (SEM). Degradation of the devices was also observed using electrical measurements, namely impedance spectroscopy. The optical and electrical spectra were analyzed, as well as a results from Energy-Dispersive X-ray Spectroscopy (EDS).
Jan Macioszczyk,
Wroclaw University of Science and Technology
Wroclaw, Lower Silesia

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