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|3D TSV Inductors for Secure IoT|
|Keywords: TSV, Inductor, IoT|
|This paper describes the design of through-silicon via (TSV)-based inductors for secure tunable Internet of Things (IoT) devices. For a cybersecurity infrastructure, we designed a 3D inductors with security hardware using physically unclonable function (PUF) circuit. The secure 3D inductor could be tuned to desirable frequency by using MEMS switches. Different fabrication technique of 3D TSV inductors are provided to maintain high Q and inductance in high frequency.|
|Bruce Kim, Professor
City University of New York