Honeywell

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Digital Holographic Microscopy: How Real-Time Imaging of 3D Topography is Revolutionizing Microelectronics Testing
Keywords: Optical Testing, Real-time Imaging, Digital Holographic Microscopy
Medical MEMS and sensors market has experienced tremendous growth. This has helped drive the development of cutting-edge technologies designed to provide small, rapid and cost- effective solutions. Guaranteeing the functionality and long-term reliability of each device is a crucial step; however, quality control is expensive, time consuming and relies heavily on simulations. You can now watch how your device is reacting in response to external stimuli instantaneously and in real- time. Digital holographic microscopy (DHM) enables measurements of 3D surface topography without the need of vertical scanning, which differentiates it from other technologies like confocal microscopy or white light interferometry. Scanning the topography in the z-axis (vertical scanning) leads to very slow data acquisition times and above all the sample needs to be static at all times during the measurement. The single shot data acquisition using the DHM makes it insensitive to vibrations and allows for high-speed imaging at camera rates with sub-nm vertical resolution. Dynamic measurements of 3D topography changes induced by a mechanical force, a chemical reaction, a temperature or pressure change, or by applying voltage to study MEMS devices capabilities have now become available. Moreover, digital holographic microscopy is capable of measuring through glass, liquids, gases or vacuum, thus allowing for in- situ measurements in any environment. Examples of current applications include dynamical studies of micro- fluidics; the determination of membrane collapse voltages; measurements of the geometry, amplitude and homogeneity of ultrasonic waves; cell sorting; and protein accumulation measurements. Full-field of view measurements with high lateral and vertical resolution are critical for investigating new product designs and optimizing geometries for next generation microelectronic devices. In particular, surface acoustic waves have received strong attention in many bio-MEMS devices. Here, the membrane movement, i.e. the surface wave propagation, is the main vector for signal transfer, which will be the focus of this presentation. Studying the 3D topography along the phase of the excitation signal gives valuable insight into the energy transfer process, which is a measure of the final product’s quality. These application descriptions will clearly illustrate the benefit of utilizing this new analytical instrument’s capabilities to the microelectronic audience.
Julia Brueckner, Applications Scientist
Quantum Analytics
Foster City, California
United States


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