Here is the abstract you requested from the imaps_2019 technical program page. This is the original abstract submitted by the author. Any changes to the technical content of the final manuscript published by IMAPS or the presentation that is given during the event is done by the author, not IMAPS.
|On-Site Hydrogen and Nitrogen Provide Multiple Advantages|
|Keywords: gases, purity, reliability|
|On-site generated gases such as hydrogen and nitrogen can provide powerful advantages for semiconductor fabrication and packaging. From cost, to reliability, to purity assurance and process control, on-site generated gases provide multiple benefits.|
|Dave Wolff, Region Manager East
Nel Hydrogen (for,merly Proton OnSite)