Abstract Preview

Here is the abstract you requested from the imaps_2019 technical program page. This is the original abstract submitted by the author. Any changes to the technical content of the final manuscript published by IMAPS or the presentation that is given during the event is done by the author, not IMAPS.

ZnO Nanowire-Array Chemical Vapor Sensor
Keywords: sensor, chemical vapor desposition, nanowires
This paper describes development of ZnO nanowire-array sensor device using MEMS packaging topology. Nanostructured materials have been extensively researched for a broad spectrum of applications. Especially, development and application of nanomaterials for chemical and biological sensing have been widely reported [1-4]. The unique surface-related properties, with tunable size and shape-dependent physical and chemical properties, offer great potential for manipulating and improving sensing behavior. These characteristics have been demonstrated to aid in improving sensitivity and response rate of sensors. Maturity of synthesis techniques and availability of variety in terms of morphology and structure of these nanomaterials have provided immense flexibility to researchers for application-specific sensor development. These nanosensors have, therefore, proven to be quite useful in areas, such as environmental sensing, homeland security, vehicular emission control, industrial gas detectors, and biosensing. In this work we compare two distinct sensor fabrication techniques and present a comparative case study for ZnO nanowire-array sensors for sensitive determination of trace amounts of p-nitrophenol vapor under ambient conditions. First, a single ZnO nanowire device was fabricated by using focused ion beam and E-beam lithography techniques. After appropriate characterization and analysis the drawbacks and limitations of this approach are highlighted. Second, we fabricated MEMS switches to package functionalized nanowire-arrays to determine different chemical compounds in the same package. The IV characteristics of the ZnO nanowire-based array devices have been measured through a semiconductor parameter analyzer.
Bruce Kim, Professor
City University of New York
New York, NY

  • Amkor
  • ASE
  • Canon
  • Corning
  • EMD Performance Materials
  • Honeywell
  • Indium
  • Kester
  • Kyocera America
  • Master Bond
  • Micro Systems Technologies
  • MRSI
  • Palomar
  • Promex
  • Qualcomm
  • Quik-Pak
  • Raytheon
  • Rochester Electronics
  • Specialty Coating Systems
  • Spectrum Semiconductor Materials
  • Technic