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IMAPS/ACerS
1st International Conference and Exhibition on
Ceramic Interconnect and
Ceramic Microsystems Technologies (CICMT)
Co-located with the 107th
Annual Meeting of the American Ceramic Society
April
10 - 13, 2005
Baltimore
Marriott Waterfront Hotel
700 Aliceanna Street
Baltimore, MD USA 21202
Ph: 410-385-3000; Fax: 410-385-0330
When making
reservations, please reference the American Ceramic Society.
Single $169
General
Chairs: |
Technical
Program Chairs: |
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Register
by Fax/Mail (pdf)
Message
from the Chairs | Advisory
Board | Program PDF
Tabletop
Exhibit Application | Reserve Booth On-line
Program
at a Glance: (Program
Grid PDF)
Sunday: Rustum Roy Lecture
Monday: Keynote
1 | Keynote 2 | Orton
Memorial Lecture | Keynote
3 | MP1
- Materials Solution... | MP2 -
Cofiring | MP3
- Microsystem Materials... | MP4
- Dimensional Control...
Tuesday: Keynote
4 | TA1 - Ceramic Microsystems... | TA2
- Processing Integrated... | TA3
- Ceramic Microsystems... | TA4
- Materials Integration... | Global Business Council
Wednesday: Keynote
5 | WA1 - Design and Fabrication... |
WA2 - Design, Simulation... | WA3
- Ceramic Microsystems... | WA4
- Characterizing Materials... | Keynote
6 | WP1 - Ceramics... | WP2
- Ink Jet Printing... | WP3 - Microsystem
Materials...
Message from the General Co-Chairs
Under the joint sponsorship of the International Microelectronics
And Packaging Society (IMAPS) and the American Ceramic
Society (ACerS), the scope of the very successful Ceramic
Interconnect Conference has expanded. The renamed International
Conference on Ceramic Interconnect and Ceramic Microsystems
Technologies (CICMT) combines the complementary interests,
strengths, and leadership of the constituencies of both
IMAPS and ACerS to focus on and accelerate advances in
both ceramic interconnect and ceramic microsystems. We
believe this conference will be THE premier global forum
on ceramic interconnect and ceramic microsystems, two of
the fastest growing areas of ceramic technology.
We thank our 21-member international advisory board
(see www.cicmt.org), Technical Co-Chairs, Kevin Ewsuk
(Sandia National Laboratories) and Mike Ehlert (Barry
Industries, Inc.), session organizers/leaders, and the
IMAPS and ACerS staff for their support and leadership
in putting this program together.
The participation of speakers from 13 different countries
in Europe, Asia, and the Americas reflects the international
scope of this three-day conference. Six invited keynote
speakers will provide comprehensive overviews of current
and future directions in key areas, including: ceramic
microsystems, ceramic interconnect, materials and processing,
automotive applications, and design and integration.
Additionally, 57 contributed papers in 15 different sessions
will address the latest advances in ceramic interconnect
and ceramic microsystems.
As an added bonus, Mike O'Neill (Heraeus, Inc.) and
Mike Lanagan (The Pennsylvania State University) have
organized a special session entitled "Business of
Emerging Microsystems" that will feature the perspectives
of government, industry, and national laboratory speakers.
Following this, David Wilcox will lead a panel discussion
on opportunities and needs to accelerate the ceramic
microsystems thrust. The special business session and
panel discussion will address the infrastructure being
developed to support the vital emerging ceramic microsystems
market.
Finally, to provide an opportunity for
those involved in development and manufacturing to
meet suppliers who
support the industry, space has been set aside for tabletop
exhibits. To facilitate networking, these exhibits will
be located in the same room used for the breaks and meals.
To reserve space, visit www.cicmt.org or
contact Ann Bell (abell@imaps.org), 202-548-8717. Space
is limited,
so reserve yours as soon as possible.
To promote collaboration and interaction with industry,
a limited number of tabletop exhibit spaces have been
reserved for non-commercial organizations such as universities
and national laboratories. This space will be made available,
on a first come first served basis, to qualifying organizations.
Contact Sam Horowitz or Dave Wilcox for more information.
The 1st International Conference on Ceramic Interconnect
and Ceramic Microsystems Technologies has all of the
ingredients of a successful meeting; please join us in
Baltimore, April 10-13, 2005.
Samuel J. Horowitz and David L. Wilcox
General Co-Chairs
Sunday, April 10
Registration: 4 pm – 7
pm
Frontier of Science and Society - Rustum Roy Lecture:
5 pm - 6 pm
Speaker: Dr. Arden L. Bement, Jr., National Institute
of Standards and Technology
Welcome Reception: 6 pm - 7 pm
Monday, April 11
Registration: 7 am – 5
pm
Continental Breakfast: 7
am – 8
am
Opening Remarks: 8 am – 8:30 am
Conference Chairs
Keynote Presentations: 8:30 am – 9:30
am
Title: Future Challenges and Opportunities in Multilayer
Ceramic Technology
Speakers: Clive A. Randall, G. Yang, E. Dickey, R. Eitel,
K. Rajab, M. Iwaski, E. Semouchkina, G. Semouchkina,
A. Baker, S. Rhee, K. Uchino, M. J. Lanagan, The Pennsylvania
State University
Keynote Presentations: 9:30 am – 10:30
am
Title: Current and Future Directions for Ceramic Interconnect
Speakers: Christian Hoffmann, Sebastian Brunner, Markus
Noren, EPCOS OHG
Break: 10:30 am – 11
am
Edward
Orton, Jr. Memorial Lecture: 11 am – Noon
Speaker: Dr. Peter Barnwell, Custom Interconnect (CIL)
Title: An Innovative Ceramic Technology Success - LTCC
from Laboratory to Electronics Applications in the Market
Place
Lunch: Noon – 1 pm
Keynote Presentation: 1 pm – 1:55
pm
Title: Materials Process and Manufacturing: Current and
Future Directions
Speaker: Andreas Roosen, University of Erlangen – Nuremberg
Session MP1: Materials Solution for Microsystems
Chair: Heiko Thust, Technical Univ. of Ilmenau
2 pm – 3:20 pm
On-Board Fiber Alignment in LTCC Optoelectronic Packages
Richard E. Eitel, Amanda Baker, Jose Agraz, Mike Lanagan,
Kenji Uchino, Clive Randall, The Pennsylvania State
University
Photosensitive Dielectric Paste for Micro-Patterning
Technology in LTCC System
Hyo Tae Kim, Kui Won Kang, T. Masaki, Kwang Jin Kim,
Jonghee Kim, Korea Institute of Ceramic Engineering & Technology
Micro Channel Fabrication in LTCC Substrate
W. Kinzy Jones, Surya Kappagantula, Jaing Wang, Florida
International University
Development and Evaluation of Hermetic Ceramic Microwave
Packages for Space Applications
Jens Mueller, J. Pohlner, D. Schwanke, G. Reppe, H. Thust,
R. Perrone, Micro Systems Engineering GmbH & Co.
Session MP2: Cofiring
Chairs: Fred Barlow, University of Arkansas; Martin Oppermann,
EADS Deutschland GmbH
2 pm – 3:20 pm
Camber and Stress Development during the Cofiring of
Bi-Layer Ceramic Dielectric Laminate
Jau-Ho Jean, R. T. Hsu, National Tsing Hua University
The Study of Graded Joining of Alumina and Zirconia
Ceramics in Green State
Boran Tian, Jiachen Liu, Tianjin University
Direct Interconnecting of CePO4/ZrO2 Composites in Green
State
Libin Liu, Jiachen Liu, Tianjin University
Break: 3:20 pm – 3:40
pm
Session
MP3: Microsystem Materials & Integration
Chair: Bob Freer, University of Manchester/UMIST
3:40 pm – 5 pm
Integration Concepts for the Fabrication of LTCC Structures
Amanda Baker, Michael Lanagan, Clive Randall, Elena Semouchkina,
George Semouchkin, Sayed-Khaled Rajab, Sorah Rhee,
Peter Geggier, Guenter Fuhr, The Pennsylvania State
University
Development and Processing of an Anodic Bondable LTCC
Tape
Edda Müller, B. Pawlowski, P. Rothe, R. Ehrt, A.
Heymel, E. Weiland, K. Kaschlik, VIA Electronic GmbH
Fabrication of LTCC Micro-Fluidic Devices using Sacrificial
Carbon Layers
Hansu Birol, T. Maeder, C. Jacq, R. Passerini, Y. Fournier,
S. Straessler, P. Ryser, Swiss Federal Institute of Technology
LTCC Phase Shifter Modules for RF-MEMS-Switch Integration
Thomas Bartnitzek, Edda Müller, VIA Electronic GmbH;
Raymond van Dijk, TNO-FEL
Session MP4: Dimensional Control in LTCC Systems
Chairs: Adam Schubring, Visteon Corporation; Walter Rothlingshofer,
Robert Bosch GmbH
3:40 pm – 5 pm
Zero Shrinkage of LTCC by Self-Constrained Sintering
Torsten Rabe, Wolfgang A. Schiller, Federal Institute
for Materials Research and Testing; Thomas Hochheimer,
Heraeus Inc. Circuit Materials Division, USA; Christina
Modes, Annette Kipka, W.C. Heraeus GmbH, CMD, Germany
Self Constrained Sintering LTCC - A Reliable Solution
for Automotive Electronic Application
Christina Modes, Annette Kipka, Quentin Reynolds, Michael
Neidert, Stefan Malkmus, Frieder Gora, Heraeus Circuit
Materials Division
Via Fill for Zero X-Y Shrink LTCC Tapes
Weiming Zhang, Tom Hochheimer, Peter Bokalo, Heraeus
Incorporated-Circuit Materials Division
Novel Self-Constrained Sintered Composites of Dielectric
and Ferrite LTCC Tapes for Microwave Applications
Marcel Hagymasi, Andreas Roosen, University of Erlangen-Nuremberg;
Roman Karmazin, Steffen Walter, Siemens AG
Tuesday, April 12
Registration: 7 am – 8
pm
Continental Breakfast: 7
am – 8
am
Exhibit Hours: 5 pm – 8
pm
Keynote Presentation: 8 am – 8:55
am
Title: Ceramic Microsystems for Automotive Applications
Speaker: Gerhard Schneider, Robert Bosch GmbH
Session TA1: Ceramic Microsystems and Applications I
Chair: Leszek Golonka, Wroclaw University of Technology
9 am – 10:20 am
Progress in MEMS and Micro Systems Research
Chang Liu, University of Illinois at Urbana
Microfabrication of Highly Piezoelectric Microcantilevers
for Sensor Applications
Wei-Heng Shih, Zuyan Shen, Wan Y. Shih, Drexel University
Miniaturized Sensor Elements based on LTCC Technology
for Automotive and Airborne Applications
Ulrich Schmid, Helmut Seidel, Thomas Becker, Saarland
University
LTCC Sensors for Environmental Monitoring System
Mario R. Gongora Rubio, Patrick B. Verdonck, Sergio Takeo
Kofuji, Antonio C. Seabra, Emilio Del Moral Hernandez,
Eliphas W. Simões, Marcelo Bariatto A. Fontes,
Instituto de Pesquisas Tecnolgica (IPT)
Session TA2: Processing Integrated Passives in LTCC
Chair: Raghu Settaluri, Oregon State University
9 am – 10:20 am
Post-Thermal Heat Treatment for Adjusting Buried Resistor
Values in DuPont 943 LTCC
Daniel S. Krueger, Elizabeth Parker, Gregg Barner, Honeywell
FM&T; Fernando Uribe, Scott Reed, Sandia National
Laboratories
Thin Film Technologies for Integrated Passives
Kyung-Ku Choi, Shigeki Satou, TDK Corporation
Characterization of Dried Thick-Film Resistors
Klaus Krueger, Helmut-Schmidt University
Methods to Improve Yield and Efficiency in Laser Trim
of Embedded Components
Donald M. Hague, Alf Holtz, W. M. Hague Company, Inc.
Break: 10:20 am – 10:40
am
Session TA3: Ceramic Microsystems and Applications II
Chair: Amy Moll, Boise State University
10:40 am – Noon
Novel Microsystem Applications with New Techniques in
LTCC
Ken A. Peterson, Kamlesh Patel, Clifford Ho, Steve Rohde,
Chris Nordquist, Charles Walker, Brian Wroblewski, Sandia
National Laboratories
Real-Time, in SITU, Biodetection and Quantification
using Piezoelectric Microcantilevers
John-Paul McGovern, Wei-Heng Shih, Wan Y. Shih, Drexel
University
Nerve-Gas Simulant, Dimethyl Methylphosphonate (DMMP)
Detection using Array Piezoelectric Microcantilevers
Wei-Heng Shih, Qing Zhu, Wan Y. Shih, Drexel University
Preparation of Polymeric Microspheres by an Emulsification/Solvent
Diffusion Process Employing LTCC Microfluidic Structures
Mário Ricardo Gongora-Rubio, Márcio Rodrigues
da Cunha, Alcione Penido de Oliveira Costa, Maria Inês
Ré, Instituto de Pesquisas Tecnológicas
Session TA4: Materials Integration in LTCC
Chair: Larry Zawicki, Honeywell Federal Manufacturing
and Technologies, LLC
10:40 am – Noon
Low Sintering Ni-Cu-Zn-Ferrite Tapes for LTCC Integrated
Inductors
Stefan Barth, F. Bechtold, E. Müller, VIA Electronic
GmbH; J. Mürbe, J. Töpfer, Fachhochschule Jena,
Hermsdorfer Institut für Technische Keramik
Micron Scale Conductors and Integrated Passives in LTCCs
by Electrophoretic Deposition
Jonathan Van Tassel, Clive A. Randall, The Pennsylvania
State University
Bulk Materials in LTCC Multilayers
Michael Hintz, Technical University of Ilmenau
Miniaturizing the Size of Microwave Filters by using
LTCC Technology with Hybrid Dielectrics
W. S. Lee, Y. C. Lee, Y. Z. Chung, National Cheng Kung
University
Global Business Council: 1:30 pm - 4:30 pm
Business of Emerging Microsystems
Chairs: Michael O'Neill, Heraeus Incorporated-Circuit
Materials Division; Michael Lanagan, The Pennsylvania State University
Plenary Session: 1:30 pm -
3 p.m.
Session Coordinators:
Mike Lanagan and Mike O’Neill
Overview of Research, Development, and Commercialization
of Microsystems
Commercializing Research
Michael
Kane and John. P. Riganati, Office of Technology,
Innovation and Acquisition, Sarnoff Corporation
(click to view the plenary abstract)
Michael Kane, a Distinguished member of Sarnoff's Office
of Technology Strategy, Innovation and Acquisition will be
making the presentation as John Riganati is unable to attend.
MEMS Commercialization
Carl
Freidhoff, Northrop
Grumman Corp. and Ellen M. McDevitt, MEMS Industry
Group
(click to view the plenary abstract)
Carl Freidhoff will be making the presentation
with Ellen McDevitt.
Biochips and BioMEMS for Analytics and Medical Diagnostics
Frank F. Bier, Fraunhofer IBMT
(click to view the plenary abstract)
Panel
Discussion: 3 pm – 4
pm (click to view the panel
agenda)
Ceramic Microsystems: The Path Forward
Moderator: Dr. D. L. Wilcox, Consultant
Panel Members:
Mr. Dan Amey, E. I. DuPont
Mr. Jonathan Bost, JRB Consulting, LLC
Dr. Art Chait, Eoplex Technologies, Inc.
Mr. Walter Roethlingshoefer, Robert Bosch GmbH
Prof. Dr. Andreas Roosen, University of Erlangen-Nuremberg
Reception/Dinner
in the Exhibit Hall: 5 pm – 8
pm
Wednesday, April 13
Registration: 7 am – 5
pm
Continental Breakfast: 7
am – 8
am
Exhibit Hours: 10 am – 2
pm
Keynote Presentation: 8 am – 8:55
am
Title: Integrated Design and Simulation Tools for Microsystems
Packaging: Current Capabilities and Future Needs
Speaker: Marc Desmulliez, Heriot Watt University
Session WA1: Design and Fabrication of Ceramic Microsystems
and Devices
Chair: Torsten Rabe, Federal Institute for Materials
Research and Testing
9 am – 10:20 am
Modular Micro Reaction System including Ceramic Components
Tassilo Moritz, Reinhard Lenk, Jörg Adler, Michael
Zins, Fraunhofer Institute for Ceramic Technologies and
Sintered Materials
Ceramics in Microtechnology - Materials, Processing,
Design
Hans-Joachim Ritzhaupt-Kleissl, Jürgen Haußelt,
Robert Ruprecht, Forschungszentrum Karlsruhe, Institut
für Materialforschung III
Integrated Design and Simulation of Microfluidic Devices
S. Krish Krishnamoorthy, Jerry Feng, Aditya S. Bedekar,
Shankar Sundaram, CFD Research Corporation
Fabrication of Microfluidic Oscillators by Laser Milling
in Sintered LTCC and Quartz Substrates
Rogerio Furlan, Miguel Perez Tolentino, Idalia Ramos,
Jorge J. Santiago-Aviles, University of Puerto Rico at
Humacao
Session WA2: Design, Simulation and Modeling
Chair: Daniel Amey, DuPont Microcircuit Materials
9 am – 10:20 am
Material Selection for Ceramic T/R Module Packages
Reiichi Yamada, Andrew Piloto, Ed Graddy, Gerardo Aguirre,
Mark Eblen, Arne Knudsen, Kyocera America, Inc.
Designing with LTCC in High Frequency Applications
Timothy P. Mobley, Daniel Amey, DuPont Microcircuit Materials
High-Performance Co-Planar Ferrite Inductors for RF
Applications
Michael D. Phillips, Raghu K. Settaluri, Chih-Hung Chang,
Oregon State University
Novel Crosstalk Suppression Schemes Employing Magnetic
Thin Films
Arien Sligar, Raghu K. Settaluri, Chih-Hung Chang, Oregon
State University
Break: 10:20 am – 10:40
am
Session WA3: Ceramic Microsystems and Devices
Chair: Klaus-Dieter Lang, Fraunhofer IZM
10:40 am - Noon
LTCC Microfluidic System
Leszek J. Golonka, J. Radojewski, H. Roguszczak, M. Stefanow,
T. Zawada, Wroclaw University of Technology
Meso-Scale Remote Plasma Generator using LTCC Technology
Roberto Katsuhiro Yamamoto, FATEC-SP/CEETEPS and LSI/PSI/USP,
Patrick Bernard Verdonck - LSI/PSI/USP; Mário
Ricardo Gongora-Rubio – IPT
Micro-Channel Device in LTCC
Amy J. Moll, John M. Youngsman, Donald G. Plumlee, Boise
State University
Processing of Ceramic Microparts via Low-Pressure Injection
Molding
Marcus Müller, Werner Bauer, Hans-Joachim Ritzhaupt-Kleissl,
Forschungszentrum Karlsruhe, Institut für Materialforschung
III
Session WA4: Characterizing Materials Integration Effects
Chair: Daniel Krueger, Honeywell FM&T
10:40 am – Noon
Characterization of Dielectrics and Conductors for Ceramic
Microsystems at Microwave Frequency
Michael T. Lanagan, L. Haney, S. Perini, K. Rajab, E.
Semouchkina, The Pennsylvania State University
Materials Compatibility issues in LTCC Technology and
their Effects on Structure and Electrical Properties
Hansu Birol, T. Maeder, C. Jacq, P. Ryser, Swiss Federal
Institute of Technology
Sintering Behavior of LTCC and Influence of Silver on
the Sintering Behavior
Dragan Tramosljika, Joerg Schaefer, Robert Bosch GmbH
(AE/WZK); Georg Rixecker, Fritz Aldinger, Max Planck
Institute
Study on the Interfacial Reaction between Silver Electrode
and La-Si-B-O-mullite Glass Ceramics
Yu Ju Wang, Wen-Cheng J. Wei, National Taiwan University
Lunch in Exhibit Hall: Noon – 1
pm
Keynote Presentation: 1 pm – 1:55
pm
Title: Next-Generation Microsystems: Integration Technologies
and Opportunities for Ceramics
Speaker: Duane Dimos, Sandia National Laboratories
Session WP1: Ceramics: The Microsystem Device Enabler
Chair: Paul Clem, Sandia National Laboratories
2 pm – 3:20 pm
LTCC Wet Chemical Analysis Meso-Systems
Núria Ibáñez-García, Alonso
Chamarro, Julián Mendes da Rocha, Mario Zaira
Gongora-Rubio, University Autonomous of Barcelona
Development of Microfluidic Devices using LTCC Substrates
Roberto Eduardo Bruzetti Leminski, Eliphas Wagner Simões,
Rogerio Furlan, Idalia Ramos, Mário Ricardo Gongora-Rubio,
Nilton Itiro Morimoto, J. J. Santiago-Aviles, Universidade
de São Paulo
Hot-Plate Gas Sensors - Are Ceramics Better?
Kita Jaroslaw, Frank Rettig, Ralf Moos, University of
Bayreuth; Karl-Heinz Drüe, Heiko Thust, Technical
University of Ilmenau
A Comparative Study of Technology and Architecture for
Actuators realized with PZT Layers in LTCC Structures
Darko Belavic, Marko Hrovat, Janez Holc, Marija Kosec,
Barbara Malic, Marina Santo Zarnik, Sivo Drnovšek,
Jena Cilensek , HIPOT-R&D and Jozef Stefan Institute
Session WP2: Ink Jet Printing Technology
Chairs: Veena Tikare, Sandia National Laboratories; Tom
Swiler, Sandia National Laboratories
2 pm – 3:20 pm
Ink Jet Printing and Sintering PZT
Brian Derby, Tianming Wang, University of Manchester
DoD-Printing of Conductive Silver Tracks
Dominik Cibis, Klaus Krueger, Prof. Dr.-Ing., Helmut-Schmidt
University
Break: 3:20 pm – 3:40
pm
Session WP3: Microsystem Materials and Fabrication
Chair: Dean Anderson, TRS Ceramics, Inc. and The Pennsylvania
State University
3:40 pm – 5 pm
Via Formation in LTCC Tape: A Comparison of Technologies
Klaus-Jurgen Wolter, Dresden University of Technology;
Gunter Hagen, KMS Kemmer Technology Center - Dresden
Direct-Write Laser Exposure of Photosensitive Conductive
Inks using Shaped-Beam Optics
Scott S. Corbett, Jeff Strole, Wilson Lu, MicroConnex;
Edward Swenson, ElectroScientific Industries
High-Volume Print Forming, HVPF™ - A New Method
for Manufacturing Large Volumes of ComplexMetal-Ceramic
and Hybrid Components
Arthur L. Chait, EoPlex Technologies, Inc.
Cold Low Pressure Lamination of Structured Ceramic Green
Tapes
Andreas Roosen, Karin Schindler, University of Erlangen – Nuremberg
Closing Remarks: 5 pm – 5:10
pm
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